ISZ-500 Integrated Z-Axis Gyroscope


InvenSense Integrated Z-Axis Gyroscope

The ISZ-500 Z-axis integrated MEMS rate gyroscope is designed for high performance audio-video remote controllers, 3D mice, and general motion sensing applications which require sensing rotational motion up to ±500°/sec
The device can be used as a standalone yaw-rate sensor, or can be combined with the InvenSense IDG-500 X/Y-axis gyroscope, for a complete 3-axis solution where all devices mount in plane with the rest of the system electronics.  The ISZ-500 features a primary output with a full-scale range of ±500°/sec, for higher-speed motion tracking; and has a secondary output with a full-scale range of ±110°/sec, for higher-sensitivity applications.

The device leverages InvenSense’s patented and proprietary Nasiri-Fabrication design and manufacturing platform, where the MEMS and CMOS control electronics are bonded and hermetically sealed, allowing direct electrical interconnections and testing at the wafer level.  This approach minimizes parasitic capacitance and improves signal-to-noise ratios versus competitive solutions.

The ISZ-500 includes all the integrated electronics required for complete application-ready functionality. Factory-trimmed scale factors eliminate the need for external active components and end-user calibration. An integrated AutoZero feature helps minimize bias drift over temperature.  The part is available in a compact 4x5x1.2mm package.

This product is RoHS and Green Compliant.


  • High performance motion sensing game controllers
  • Pointing devices, multimedia remotes, & computer mice


  • Integrated Z-axis gyro on a single chip
  • Complements IDG-500 dual axis (X/Y) gyro, for a solution where all sensors mount in-plane with the rest of the system electronics
  • Two separate outputs per axis for higher speed motions and lower-speed precise movements:
    • 500°/s full scale range (higher speed)
    • 110°/s full scale range (high precision)
  • Low bias drift over temperature
  • Auto Zero function
  • Temperature sensor
  • Integrated amplifiers & low-pass filters
  • Highest cross-axis isolation by design
  • Superior vibration rejection over a wide frequency range
  • 10,000 g shock tolerance
  • 3V single supply operation
  • 4x5x1.2mm QFN package
  • RoHS Compliant (Completely Lead Free)


  •  World’s smallest single-axis gyro sensor
  •  Highest dynamic range to measure fast-action motion
  •  Integrated electronics for complete signal conditioning
  •  Lowest cross-axis sensitivity for best signal accuracy
  •  Hermeticity for high temperature & humidity resistance
  •  Most robust design for high impact consumer electronics
  •  Compatible with standard SMT assembly processes

EOL Items:

Part # Full Scale Range (FSR) Secondary Output (FSR) Sensitivity Sensitivity Secondary Output Output Operating Voltage Supply Package Size PDF Documentation Evaluation Board (EVB) Purchase
UNITS: (°/sec) (°/sec) (mV/°/sec) (mV/°/sec) (V) (mm) (.pdf) (add to cart) (add to cart)

±500 ±110 2.0 9.1 Analog 3.0 ±10% 4x5x1.2 Product Spec Evaluation Board Guide EOL EOL
* Supported, but not recommended for new designs. See EOL notice for more information.

  • Disclaimer

    • InvenSense sensors should not be used or sold in the development, storing, production and utilization of any conventional or mass-destructive weapons or any other weapons or life-threatening applications as well as in any other life-critical applications including but not limited to medical equipment, transportation, aerospace and nuclear instruments, undersea equipment, power plant equipment, disaster prevention and crime prevention equipment. In devices or systems whereby malfunction of these products can be expected to result in personal injury and casualties, InvenSense customers using or selling these products do so at their own risk and agree to keep InvenSense harmless from any consequences. InvenSense reserves the right to make changes to this product, including its circuits and software, in order to improve its design and/or performance, without prior notice. InvenSense makes no warranty, either expressed or implied with respect to any product, and specifically disclaims all other warranties, including warranties for merchantability, non-infringement, and fitness for any particular purpose. For more information go to Terms and Conditions.
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